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228nm| Wavelength (nm) | 228± 1 |
| Operating mode | Electro-optic Q-switched |
| Average power (W) | 1~40mW (40mW@ 10kHz) |
| Average power (W) = Single pulse energy (mJ) * Rep. rate (kHz) | |
| Single pulse energy ( µJ) | 1~4 (4µJ @ 10kHz) |
| Rep. rate (kHz) | 10 |
| Pulse duration (ns) | ~4 @ 10kHz |
| Peak power (kW) | ~ 1 ( 1kW@ 10kHz) |
| Ave power stability (over 4 hours) | <3%, <5% |
| Warm-up time (minutes) | < 10 |
| Beam divergence, full angle (mrad) | <5 |
| Beam diameter at the aperture ( 1/e2,mm) | <8 |
| Beam height from base plate (mm) | 79 |
| Cooled method | Water cooled |
| Operating temperature (C) | 10~35 |
| Power supply (220/ 110VAC) | PSU-AOM (3U) |
| Expected lifetime (hours) | 10000 |
| Warranty period | 1 year |
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