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213nm| Wavelength (nm)波长 | 213± 1 | |
| Operating mode | Pulsed | |
| Output power (mW) | 10 | 30 |
| Power stability (rms, over 4 hours) | <3% ，< 1% | |
| Pulse width (ps) | <50 | |
| Beam divergence, full angle (mrad) | <3 | |
| Beam diameter (mm) | ~2 | |
| Repetition frequency (MHz) | 5 | |
| Beam height from base plate (mm) | 128 | |
| Cooled method | Air cooled | |
| Warm-up time (minutes) | < 15 | |
| Operating temperature (C) | 15~30 | |
| Power supply (AC 220V) | PSU-DPS-Pico | |
| Expected lifetime (hours) | 10000 | |
| Warranty | 1 year | |
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