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261nm| Wavelength (nm) | 261± 1 |
| Operating mode | CW |
| Output power (mW) | 1-5 |
| Power stability (rms, over 4 hours) | < 10% |
| Transverse mode | Near TEM00 |
| Beam diameter at the aperture ( 1/e2, mm) | <2.0 |
| Beam divergence, full angle (mrad) | <6.0 |
| Polarization Ratio | >50:1, (Horizontal or Vertical Optional) |
| Warm-up time (minutes) | < 10 |
| Pointing stability after warm-up (mrad) | <0.05 |
| Beam height from base plate (mm) | 45 |
| Operating Temperature (°C) | 10-35 |
| Power supply (90-264VAC) | PSU-H-LED/ |
| Warranty | 1 year |
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